[E-10-6L] 1 x 3 Silicon Oxynitride Tunable Optical Waveguide Attenuators based on the Multimode Interference (MMI) Effect

Z. L. Liao¹、R. W. Chuang^1,2 (1.National Cheng Kung Univ.、2.National Nano Device Labs., Taiwan)

https://doi.org/10.7567/SSDM.2008.E-10-6L