[E-3-4] Using Selective Zn Diffusion to Enhance the Performance of the PD in Monolithically Integrated InP/InGaAs p-i-n PD/HBT

W. K. Huang¹、S. C. Huang¹、Y. M. Hsin¹、J. W. Shi¹ (1.National Central Univ., Taiwan)

https://doi.org/10.7567/SSDM.2008.E-3-4