Evanescent-Coupled SEG-Ge Lateral and Vertical PIN Photodetectors Integrated on Si-Waveguide

J. Wang; W. Y. Loh; K. T. Chua; H. Zang; Y. Z. Xiong; T. H. Loh; M. B. Yu; S. J. Lee; G. Q. Lo; D. L. Kwong

doi:https://doi.org/10.7567/SSDM.2008.E-8-3

2008 International Conference on Solid State Devices and Materials

2008年9月23日〜 2008年9月26日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[E-8-3] Evanescent-Coupled SEG-Ge Lateral and Vertical PIN Photodetectors Integrated on Si-Waveguide

J. Wang²、W. Y. Loh¹、K. T. Chua¹、H. Zang²、Y. Z. Xiong¹、T. H. Loh¹、M. B. Yu¹、S. J. Lee²、G. Q. Lo¹、D. L. Kwong¹ (1.Inst. of Microelectronics、2.National Univ. of Singapore, Singapore)

https://doi.org/10.7567/SSDM.2008.E-8-3

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