Control of Structure and Electrical Properties of Carbon Nanowalls : Effect of N<sub>2</sub>/O<sub>2</sub> Addition to Fluorocarbon Plasma CVD with H Radical Injection

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

W. Takeuchi¹, M. Hiramatsu², Y. Tokuda³, H. Kano⁴, M. Hori¹ (1.Nagoya Univ., 2.Meijo Univ., 3.Aichi Inst. of Tech., 4.NU Eco-Eng. Co., Ltd., Japan)