The Japan Society of Applied Physics

[F-1-5] Control of Structure and Electrical Properties of Carbon Nanowalls : Effect of N2/O2 Addition to Fluorocarbon Plasma CVD with H Radical Injection

W. Takeuchi1、M. Hiramatsu2、Y. Tokuda3、H. Kano4、M. Hori1 (1.Nagoya Univ.、2.Meijo Univ.、3.Aichi Inst. of Tech.、4.NU Eco-Eng. Co., Ltd., Japan)

https://doi.org/10.7567/SSDM.2008.F-1-5