The Japan Society of Applied Physics

[G-1-2] AlGaN/GaN/AlGaN Double Heterostructures on 4 inch Si Substrates for High Breakdown Voltage Field-Effect Transistors with Low On-Resistance

D. Visalli1,2、J. Derluyn1、S. Degroote1、M. Leys1、K. Cheng1,2、M. Germain1、M. Van Hove1、G. Borghs1,2 (1.IMEC、2.Katholieke Univ. Leuven, Belgium)

https://doi.org/10.7567/SSDM.2008.G-1-2