[G-1-5] Gate Recessed AlGaN/GaN based Normally-Off HEMTs for High Frequency Operation S. Maroldt1、C. Haupt1、W. Pletschen1、S. Müller1、R. Quay1、O. Ambacher1 (1.IAF, Germany) https://doi.org/10.7567/SSDM.2008.G-1-5