[G-1-5] Gate Recessed AlGaN/GaN based Normally-Off HEMTs for High Frequency Operation S. Maroldt1, C. Haupt1, W. Pletschen1, S. Müller1, R. Quay1, O. Ambacher1 (1.IAF, Germany) https://doi.org/10.7567/SSDM.2008.G-1-5