[G-7-1] 4H-SiC Trench MOSFETs with Low On Resistance

Y. Nakano¹、T. Mukai¹、R. Nakamura¹、T. Nakamura¹、A. Kamisawa¹ (1.ROHM Co., Ltd., Japan)

https://doi.org/10.7567/SSDM.2008.G-7-1