[H-1-3] Self-Aligned Top-Gate Nanocrystalline Silicon Thin-Film Transistors with Source/Drain Regions Activated by Diode-Pumped Continuous-Wave Green Laser

W. Sato¹、A. Hara¹、S. Kurauchi¹、Y. Doi¹、M. Kobata²、K. Kitahara² (1.Tohoku Gakuin Univ.、2.Shimane Univ., Japan)

https://doi.org/10.7567/SSDM.2008.H-1-3