[H-1-3] Self-Aligned Top-Gate Nanocrystalline Silicon Thin-Film Transistors with Source/Drain Regions Activated by Diode-Pumped Continuous-Wave Green Laser
W. Sato1, A. Hara1, S. Kurauchi1, Y. Doi1, M. Kobata2, K. Kitahara2
(1.Tohoku Gakuin Univ., 2.Shimane Univ., Japan)
https://doi.org/10.7567/SSDM.2008.H-1-3
