[H-3-2] Low-Energy Oxygen Ion Irradiation Effects on Carbon Nanotube Field-Effect Transistors with Passivation Films

S. Nagaso¹, Y. Ohno¹, K. Maehashi¹, K. Inoue¹, K. Yamamoto², K. Matsumoto^1,2 (1.Osaka Univ., 2.AIST, Japan)

https://doi.org/10.7567/SSDM.2008.H-3-2