[H-3-2] Low-Energy Oxygen Ion Irradiation Effects on Carbon Nanotube Field-Effect Transistors with Passivation Films

S. Nagaso¹、Y. Ohno¹、K. Maehashi¹、K. Inoue¹、K. Yamamoto²、K. Matsumoto^1,2 (1.Osaka Univ.、2.AIST, Japan)

https://doi.org/10.7567/SSDM.2008.H-3-2