[H-3-3] High-density Horizontally-aligned Growth of Carbon Nanotubes for High-performance Field-effect Transistors

Y. Ohno¹, D. Phokharatkul¹, H. Nakano², S. Kishimoto¹, T. Mizutani¹ (1.Nagoya Univ., 2.ULVAC, Inc., Japan)

https://doi.org/10.7567/SSDM.2008.H-3-3