[H-5-4] Uniaxially Strained SiGe/Si Core/Shell Nanowire pFETs Integrated on Bulk Si with Ni_xSi_yGe_1-x-y Source and Drain Contacts

Y. Jiang^1,2, N. Singh¹, T. Y. Liow¹, P. C. Lim³, S. Tripathy³, S. A. Oh³, G. Q. Lo¹, D. S. H. Chan², D. L. Kwong¹ (1.Inst. of Microelectronics, 2.National Univ. of Singapore, 3.Inst. of Materials Res. and Eng., Singapore)

https://doi.org/10.7567/SSDM.2008.H-5-4