[P-1-16] Low Temperature and Rapid Oxidation of GaN Surface by Saturated Water Vapor in High Pressure

T. Futatsuki^1,2、T. Oe¹、H. Aoki²、N. Komatsu²、C. Kimura²、T. Sugino² (1.Organo Corp.、2.Osaka Univ., Japan)

https://doi.org/10.7567/SSDM.2008.P-1-16