[P-1-16] Low Temperature and Rapid Oxidation of GaN Surface by Saturated Water Vapor in High Pressure

T. Futatsuki^1,2, T. Oe¹, H. Aoki², N. Komatsu², C. Kimura², T. Sugino² (1.Organo Corp., 2.Osaka Univ., Japan)

https://doi.org/10.7567/SSDM.2008.P-1-16