Characterization of Strain Relaxation Process during Ge Condensation by Synchrotron Microbeam X-ray Diffraction

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

T. Inoue¹, D. Shimokawa¹, T. Hosoi¹, T. Shimura¹, Y. Imai², O. Sakata², S. Kimura², H. Watanabe¹ (1.Osaka Univ., 2.JASRI, Japan)