Characterization of Strain Relaxation Process during Ge Condensation by Synchrotron Microbeam X-ray Diffraction

2008 International Conference on Solid State Devices and Materials

2008年9月23日〜 2008年9月26日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

T. Inoue¹、D. Shimokawa¹、T. Hosoi¹、T. Shimura¹、Y. Imai²、O. Sakata²、S. Kimura²、H. Watanabe¹ (1.Osaka Univ.、2.JASRI, Japan)