The Japan Society of Applied Physics

[P-1-4] Low Temperature, Anisotropic, Lattice-Plane-Free and Damage-free Oxidation for 3 Dimensional Structure by Oxygen Neutral Beams

M. Yonemoto1, K. Sano1, K. Endo2, T. Matsukawa2, M. Masahara2, S. Samukawa1 (1.Tohoku Univ., 2.AIST, Japan)

https://doi.org/10.7567/SSDM.2008.P-1-4