Low Temperature, Anisotropic, Lattice-Plane-Free and Damage-free Oxidation for 3 Dimensional Structure by Oxygen Neutral Beams

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

M. Yonemoto¹, K. Sano¹, K. Endo², T. Matsukawa², M. Masahara², S. Samukawa¹ (1.Tohoku Univ., 2.AIST, Japan)