[P-1-4] Low Temperature, Anisotropic, Lattice-Plane-Free and Damage-free Oxidation for 3 Dimensional Structure by Oxygen Neutral Beams

M. Yonemoto¹、K. Sano¹、K. Endo²、T. Matsukawa²、M. Masahara²、S. Samukawa¹ (1.Tohoku Univ.、2.AIST, Japan)

https://doi.org/10.7567/SSDM.2008.P-1-4