[P-11-5] Frequency Dependences of pH Sensitivity and Light Immunity for Single and Stacked HfO₂ EIS Structures

C. E. Lue¹、C. S. Lai¹、W. C. Lin¹、C. M. Yang² (1.Chang Gung Univ.、2.Inotera memories Inc., Taiwan)

https://doi.org/10.7567/SSDM.2008.P-11-5