[P-11-5] Frequency Dependences of pH Sensitivity and Light Immunity for Single and Stacked HfO2 EIS Structures
C. E. Lue1, C. S. Lai1, W. C. Lin1, C. M. Yang2
(1.Chang Gung Univ., 2.Inotera memories Inc., Taiwan)
https://doi.org/10.7567/SSDM.2008.P-11-5