MEMS-Based Multi-Sensors: Fabrication and Analysis

D. S. Eun; D. Y. Kong; H. J. Yoo; Y. M. Hong; T. W. Kang; S. J. Chang; I. S. Yu; J. K. Shin; J. H. Lee

doi:https://doi.org/10.7567/SSDM.2008.P-11-9

2008 International Conference on Solid State Devices and Materials

2008年9月23日〜 2008年9月26日
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-11-9] MEMS-Based Multi-Sensors: Fabrication and Analysis

D. S. Eun¹、D. Y. Kong¹、H. J. Yoo¹、Y. M. Hong¹、T. W. Kang¹、S. J. Chang¹、I. S. Yu²、J. K. Shin¹、J. H. Lee¹ (1.Kyungpook National Univ.、2.Kyungdong College of Techno-Info., Korea)

https://doi.org/10.7567/SSDM.2008.P-11-9

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