MEMS-Based Multi-Sensors: Fabrication and Analysis

D. S. Eun; D. Y. Kong; H. J. Yoo; Y. M. Hong; T. W. Kang; S. J. Chang; I. S. Yu; J. K. Shin; J. H. Lee

doi:https://doi.org/10.7567/SSDM.2008.P-11-9

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

[P-11-9] MEMS-Based Multi-Sensors: Fabrication and Analysis

D. S. Eun¹, D. Y. Kong¹, H. J. Yoo¹, Y. M. Hong¹, T. W. Kang¹, S. J. Chang¹, I. S. Yu², J. K. Shin¹, J. H. Lee¹ (1.Kyungpook National Univ., 2.Kyungdong College of Techno-Info., Korea)

https://doi.org/10.7567/SSDM.2008.P-11-9

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