[P-2-14] Enhancement of Wafer Test Yield of CIS Device with MicroLens Formed by the Optimized LTO Film

K. Park¹、S. Ryu¹、J. Yang¹、S. Lee¹、M. Han¹、H. Choi¹、H. Lee¹、J. Han¹ (1.Dongbu HiTek Co., Ltd., Korea)

https://doi.org/10.7567/SSDM.2008.P-2-14