Direct Observation of Tensile Stress in Silicon Oxide Films using Cathodoluminescence Spectroscopy

2008 International Conference on Solid State Devices and Materials

Sep 23, 2008 - Sep 26, 2008
Tsukuba International Congress Center (EPOCHAL TSUKUBA), Ibaraki, Japan

S. Kakinuma¹, K. Nishikata¹, N. Yamashita², N. Naka¹, S. Kashiwagi¹, K. Matsumoto¹, T. Namazu², S. Inoue² (1.HORIBA, Ltd., 2.Univ. of Hyogo, Japan)