[P-4-5] Nanoscaling of Phase Change Memory Cells for High Speed Memory Applications

W. J. Wang¹、L. P. Shi¹、D. Loke²、R. Zhao¹、K. G. Lim¹、H. K. Lee¹、T. C. Chong^1,2 (1.A*STAR、2.National Univ. of Singapore, Singapore)

https://doi.org/10.7567/SSDM.2008.P-4-5