[P-6-4] Low Damage SiN_x Surface Passivation using Remote ICP-CVD for AlGaN/GaN HEMTs

H. J. Cho¹、J. C. Her¹、K. I. Lee¹、H. Y. Cha²、K. S. Seo¹ (1.Seoul National Univ.、2.Hongik Univ., Korea)

https://doi.org/10.7567/SSDM.2008.P-6-4