[P-6-4] Low Damage SiN_x Surface Passivation using Remote ICP-CVD for AlGaN/GaN HEMTs

H. J. Cho¹, J. C. Her¹, K. I. Lee¹, H. Y. Cha², K. S. Seo¹ (1.Seoul National Univ., 2.Hongik Univ., Korea)

https://doi.org/10.7567/SSDM.2008.P-6-4