The Japan Society of Applied Physics

[P-7-10] A Fast Sapphire Substrate Surface Roughening Technology using CO2 Laser for Enhancing Light Extraction of GaN-Based Flip-Chip Light-Emitting Diodes

P. R. Wang1, S. J. Wang1, K. M. Uang2, T. M. Chen2, F. T. Tang1, H. Y. Kuo1, H. Kuan3 (1.National Cheng Kung Univ., 2.Wu Feng Inst. of Tech., 3.Southern Taiwan Univ. of Tech., Taiwan)

https://doi.org/10.7567/SSDM.2008.P-7-10