[P-7-5] A Maskless Method of Patterned Porous Silicon Formation by a Localized Electrical Field

J. C. Lin¹, W. C. Tsai², H. T. Hou¹, S. J. Wang² (1.St. John's Univ., 2.National Cheng Kung Univ., Taiwan)

https://doi.org/10.7567/SSDM.2008.P-7-5