[P-7-5] A Maskless Method of Patterned Porous Silicon Formation by a Localized Electrical Field

J. C. Lin¹、W. C. Tsai²、H. T. Hou¹、S. J. Wang² (1.St. John's Univ.、2.National Cheng Kung Univ., Taiwan)

https://doi.org/10.7567/SSDM.2008.P-7-5