A Theoretical Study on Deposition Processes of MgO Thin Films: Ultra-Accelerated Quantum Chemical Molecular Dynamics Approach

A. Endou; K. Serizawa; H. Onuma; H. Kikuchi; A. Suzuki; M. Koyama; H. Tsuboi; N. Hatakeyama; H. Takaba; C. A. Del Carpio; R. C. Deka; M. Kubo; H. Kajiyama; A. Miyamoto

doi:https://doi.org/10.7567/SSDM.2008.P-8-5

[P-8-5] A Theoretical Study on Deposition Processes of MgO Thin Films: Ultra-Accelerated Quantum Chemical Molecular Dynamics Approach

A. Endou¹, K. Serizawa¹, H. Onuma¹, H. Kikuchi¹, A. Suzuki¹, M. Koyama¹, H. Tsuboi¹, N. Hatakeyama¹, H. Takaba¹, C. A. Del Carpio¹, R. C. Deka², M. Kubo¹, H. Kajiyama³, A. Miyamoto¹ (1.Tohoku Univ., Japan, 2.Tezpur Univ., India, 3.Hiroshima Univ., Japan)

https://doi.org/10.7567/SSDM.2008.P-8-5

2008 International Conference on Solid State Devices and Materials

[P-8-5] A Theoretical Study on Deposition Processes of MgO Thin Films: Ultra-Accelerated Quantum Chemical Molecular Dynamics Approach