[P-8-5] A Theoretical Study on Deposition Processes of MgO Thin Films: Ultra-Accelerated Quantum Chemical Molecular Dynamics Approach

A. Endou¹、K. Serizawa¹、H. Onuma¹、H. Kikuchi¹、A. Suzuki¹、M. Koyama¹、H. Tsuboi¹、N. Hatakeyama¹、H. Takaba¹、C. A. Del Carpio¹、R. C. Deka²、M. Kubo¹、H. Kajiyama³、A. Miyamoto¹ (1.Tohoku Univ., Japan、2.Tezpur Univ., India、3.Hiroshima Univ., Japan)

https://doi.org/10.7567/SSDM.2008.P-8-5