The Japan Society of Applied Physics

[P-8-5] A Theoretical Study on Deposition Processes of MgO Thin Films: Ultra-Accelerated Quantum Chemical Molecular Dynamics Approach

A. Endou1、K. Serizawa1、H. Onuma1、H. Kikuchi1、A. Suzuki1、M. Koyama1、H. Tsuboi1、N. Hatakeyama1、H. Takaba1、C. A. Del Carpio1、R. C. Deka2、M. Kubo1、H. Kajiyama3、A. Miyamoto1 (1.Tohoku Univ., Japan、2.Tezpur Univ., India、3.Hiroshima Univ., Japan)

https://doi.org/10.7567/SSDM.2008.P-8-5