[P-8-8] μc-Si_1-xGe_x Deposition on SiO₂ by RF Magnetron Sputtering

A. Hiroe¹, T. Goto¹, A. Teramoto¹, T. Ohmi¹ (1.Tohoku Univ., Japan)

https://doi.org/10.7567/SSDM.2008.P-8-8