[P-9-2] Zn_1-xCu_xO Films Grown by Remote-plasma-enhanced Metalorganic Chemical Vapor Deposition with Cu(dibm)₂

B. Hu¹、M. Adachi¹、T. Aoshima¹、A. Nakamura¹、J. Temmyo¹ (1.Shizuoka Univ., Japan)

https://doi.org/10.7567/SSDM.2008.P-9-2