Three-Dimensional Visualization Technique for Crystal Defects in High Performance CMOS Devices with Embedded SiGe-Source/Drain

S. Kudo; N. Nakanishi; Y. Hirose; K. Sato; T. Yamashita; H. Oda; K. Kashihara; N. Murata; T. Katayama; K. Asayama; J. Komori; E. Murakami

doi:https://doi.org/10.7567/SSDM.2009.B-1-2

[B-1-2] Three-Dimensional Visualization Technique for Crystal Defects in High Performance CMOS Devices with Embedded SiGe-Source/Drain

S. Kudo¹、N. Nakanishi¹、Y. Hirose¹、K. Sato¹、T. Yamashita¹、H. Oda¹、K. Kashihara¹、N. Murata¹、T. Katayama¹、K. Asayama¹、J. Komori¹、E. Murakami¹ (1.Renesas Tech. Corp.)

https://doi.org/10.7567/SSDM.2009.B-1-2

2009 International Conference on Solid State Devices and Materials

[B-1-2] Three-Dimensional Visualization Technique for Crystal Defects in High Performance CMOS Devices with Embedded SiGe-Source/Drain