The Japan Society of Applied Physics

[B-1-2] Three-Dimensional Visualization Technique for Crystal Defects in High Performance CMOS Devices with Embedded SiGe-Source/Drain

S. Kudo1, N. Nakanishi1, Y. Hirose1, K. Sato1, T. Yamashita1, H. Oda1, K. Kashihara1, N. Murata1, T. Katayama1, K. Asayama1, J. Komori1, E. Murakami1 (1.Renesas Tech. Corp.)

https://doi.org/10.7567/SSDM.2009.B-1-2