Three-Dimensional Visualization Technique for Crystal Defects in High Performance CMOS Devices with Embedded SiGe-Source/Drain

S. Kudo; N. Nakanishi; Y. Hirose; K. Sato; T. Yamashita; H. Oda; K. Kashihara; N. Murata; T. Katayama; K. Asayama; J. Komori; E. Murakami

doi:https://doi.org/10.7567/SSDM.2009.B-1-2

[B-1-2] Three-Dimensional Visualization Technique for Crystal Defects in High Performance CMOS Devices with Embedded SiGe-Source/Drain

S. Kudo¹, N. Nakanishi¹, Y. Hirose¹, K. Sato¹, T. Yamashita¹, H. Oda¹, K. Kashihara¹, N. Murata¹, T. Katayama¹, K. Asayama¹, J. Komori¹, E. Murakami¹ (1.Renesas Tech. Corp.)

https://doi.org/10.7567/SSDM.2009.B-1-2

2009 International Conference on Solid State Devices and Materials

[B-1-2] Three-Dimensional Visualization Technique for Crystal Defects in High Performance CMOS Devices with Embedded SiGe-Source/Drain