[B-1-5] Evaluation of Effective Work Function of Pt on Bi-layer High-k/SiO₂ Stack Structure using by Backside X-ray Photoelectron Spectroscopy

T. Mori¹、A. Ohta¹、H. Murakami¹、S. Higashi¹、S. Miyazaki¹ (1.Hiroshima Univ.)

https://doi.org/10.7567/SSDM.2009.B-1-5