2009 International Conference on Solid State Devices and Materials

Oct 6, 2009 - Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan

[B-1-6] Molecular Dynamics Study of Oxidation Process with SiO emission and incorporation into the Si/SiO₂ System

N. Takahashi¹, T. Yamasaki¹, C. Kaneta¹ (1.Fujitsu Labs. Ltd.)

https://doi.org/10.7567/SSDM.2009.B-1-6

Tweet