[B-4-3] Influence of Post Cap-layer Deposition Annealing Temperature on MgO Diffusion in High-k/IFL Stacks

T. Morooka¹, T. Matsuki¹, T. Nabatame¹, J. Yugami¹, K. Ikeda¹, Y. Ohji¹ (1.Selete)

https://doi.org/10.7567/SSDM.2009.B-4-3