[B-7-2] ¹⁸O isotope tracing study of GeO Desorption from GeO₂/Ge Structure

S. Wang¹、K. Kita^1,2、T. Nishimura^1,2、K. Nagashio^1,2、A. Toriumi^1,2 (1.Univ. of Tokyo (Japan)、2.CREST-JST(Japan))

https://doi.org/10.7567/SSDM.2009.B-7-2