[B-7-2] ¹⁸O isotope tracing study of GeO Desorption from GeO₂/Ge Structure

S. Wang¹, K. Kita^1,2, T. Nishimura^1,2, K. Nagashio^1,2, A. Toriumi^1,2 (1.Univ. of Tokyo (Japan), 2.CREST-JST(Japan))

https://doi.org/10.7567/SSDM.2009.B-7-2