[B-7-5] Spectroscopic Ellipsometry Study on Defects Generation in GeO₂/Ge stacks

K. Kita^1,2, M. Yoshida¹, T. Nishimura^1,2, K. Nagashio^1,2, A. Toriumi^1,2 (1.Univ. of Tokyo(Japan), 2.CREST-JST(Japan))

https://doi.org/10.7567/SSDM.2009.B-7-5