[B-8-3] Leakage Reduction by Thermal Annealing of NiPtSi Silicided Junctions and Anomalous Spider-Web of In-Layer Pt Network

M. Tsuchiaki¹、A. Nishiyama¹ (1.Toshiba Corp.)

https://doi.org/10.7567/SSDM.2009.B-8-3