[B-8-4] Concentration of Active Dopants at NiSi/Si Interface Segregated by "Snowplow" Effect for Schottky Barrier Height Tuning

S. Migita¹, Y. Morita¹, N. Taoka¹, W. Mizubayashi¹, H. Ota¹ (1.MIRAI-AIST)

https://doi.org/10.7567/SSDM.2009.B-8-4