[C-7-1] Characteristics and Integration Challenges of FinFET-based Devices for (Sub-)22nm Technology Nodes Circuit Applications

A. Veloso¹、M. J. H. Van Dal²、N. Collaert¹、A. De Keersgieter¹、L. Witters¹、R. Rooyackers¹、A. Redolfi¹、S. Brus¹、R. Duffy²、B. J. Pawlak²、G. Vellianitis²、B. Duriez²、T. Mérelle²、P. P. Absil¹、S. Biesemans¹、M. Jurczak¹、T. Hoffmann¹、R. J. P. Lander² (1.IMEC(Belgium)、2.NXP-TSMC Res. Center(Belgium))

https://doi.org/10.7567/SSDM.2009.C-7-1